Makabe, Toshiaki <br/><br/>
Plasma electronics  applications in microelectronic device fabrication  
Toshiaki Makabe and Zoran Lj. Petrovic 
 - New York  Taylor & Francis  2006 
 - 339p.  fig.;ill.;index.;ref. 
 - Series in Plasma Physics .
<br/><br/><label>Universal Decimal Class. No.: </label>533.9:621.38  / MAK