000 | 00654nam a2200181Ia 4500 | ||
---|---|---|---|
003 | IN-MuIIG | ||
008 | 231010s9999 xx 000 0 und d | ||
020 | _a978-0-521-76300-4 | ||
040 | _cIIG Library | ||
080 |
_a533.9-113:621.039.629 _bCHA |
||
100 | _aChabert, Pascal | ||
245 | 0 |
_aPhysics of radio-frequency plasmas _cPascal Chabert and Nicholas Braithwaite |
|
260 |
_aCambridge _bCambridge University Press _c2011 |
||
300 |
_aviii+385p. _bappendix; figs;illus;index;refs |
||
650 | _aBounded PlasmaEgrlElectrical MeasurementsHelicon PlasmasPhysicsPlasmaPlasma DynamicsRadio Frequency | ||
700 | _aBraithwaite, Nicholas | ||
942 | _cBK | ||
999 |
_c18480 _d18480 |