000 00654nam a2200181Ia 4500
003 IN-MuIIG
008 231010s9999 xx 000 0 und d
020 _a978-0-521-76300-4
040 _cIIG Library
080 _a533.9-113:621.039.629
_bCHA
100 _aChabert, Pascal
245 0 _aPhysics of radio-frequency plasmas
_cPascal Chabert and Nicholas Braithwaite
260 _aCambridge
_bCambridge University Press
_c2011
300 _aviii+385p.
_bappendix; figs;illus;index;refs
650 _aBounded PlasmaEgrlElectrical MeasurementsHelicon PlasmasPhysicsPlasmaPlasma DynamicsRadio Frequency
700 _aBraithwaite, Nicholas
942 _cBK
999 _c18480
_d18480