| 000 | 00577nam a2200181Ia 4500 | ||
|---|---|---|---|
| 003 | IN-MuIIG | ||
| 005 | 20240201150314.0 | ||
| 008 | 231010s9999 xx 000 0 und d | ||
| 040 | _cIIG Library | ||
| 080 |
_a533.9:621.38 _bMAK |
||
| 100 | _aMakabe, Toshiaki | ||
| 245 | 0 |
_aPlasma electronics _bapplications in microelectronic device fabrication _cToshiaki Makabe and Zoran Lj. Petrovic |
|
| 260 |
_aNew York _bTaylor & Francis _c2006 |
||
| 300 |
_a339p. _bfig.;ill.;index.;ref. |
||
| 490 | _aSeries in Plasma Physics | ||
| 700 | _aPetrovic, Zoran Lj. | ||
| 942 |
_cBK _2udc |
||
| 999 |
_c19157 _d19157 |
||