Plasma electronics applications in microelectronic device fabrication Toshiaki Makabe and Zoran Lj. Petrovic
Material type:
TextSeries: Series in Plasma PhysicsPublication details: New York Taylor & Francis 2006Description: 339p. fig.;ill.;index.;ref
| Item type | Current library | Call number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|
| Books | Mumbai General Stack | 533.9:621.38/MAK (Browse shelf(Opens below)) | Available | 008501 |
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| 533.95:537.87/CRO Introduction to Alfven waves, An | 533.95:539.17/MIY Plasma physics and controlled nuclear fusion | 533.95:551.510.535/DAR The Earth's plasmasphere a cluster and image perspective | 533.9:621.38/MAK Plasma electronics applications in microelectronic device fabrication | 533.98:621.38/LI Plasmonic nanoelectronics and sensing | 533/LIE Elements of gas dynamics | 533.08/ROS Ionization chambers and counters experimental techniques |
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